Radiation sensitive devices

Details Radiation sensitive devices Radiation sensitive devices

G - Physics

03

F

96/191

G03F 7/095 (2006.01) G03F 7/022 (2006.01) G03F 7/115 (2006.01)

Patent

CA 1317147

ABSTRACT Improvements in or relating to Radiation Sensitive Devices. A radiation sensitive device comprising a substrate carrying a radiation sensitive layer is coated with a discontinuous covering layer which is more light sensitive than the radiation sensitive layer. The covering layer is formed by spraying and assists in improving vacuum drawdown during image-wise exposure of the device without having a deleterious affect on the exposure and development characteristics of the device.

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