Radiation sensitive devices

Details Radiation sensitive devices Radiation sensitive devices

H - Electricity

01

L

345/13, 117/23,

H01L 31/02 (2006.01) B05B 5/025 (2006.01) B05D 1/02 (2006.01) B05D 5/06 (2006.01) B05D 5/12 (2006.01) G03F 7/115 (2006.01)

Patent

CA 2030363

ABSTRACT Improvements in or relating to radiation sensitive devices A radiation sensitive device is provided with a discontinuous covering layer to improve vacuum draw down. The covering layer is produced by forming a solution or dispersion of the layer-forming material in a liquid hydrocarbon. Drops of the solution or dispersion are then sprayed onto the radiation sensitive device to form the discontinuous covering layer.

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