Raised on-chip inductor and method of manufacturing same

Details Raised on-chip inductor and method of manufacturing same Raised on-chip inductor and method of manufacturing same

H - Electricity

01

F

H01F 41/34 (2006.01) H01F 17/00 (2006.01) H01F 27/00 (2006.01) H01F 30/06 (2006.01) H01L 23/522 (2006.01) H01L 23/66 (2006.01) H01L 27/08 (2006.01)

Patent

CA 2445464

A raised on-chip planar inductor (12). An inductor (12) is fabricated on a substrate (14). The inductor (12), except for an anchoring extremity (24), is lifted from the substrate (14), preferably by application of a magnetic field to a magnetic layer (38) formed on the inductor (12). The lifting of the inductor (12) deforms a plastic bending region (26). After the magnetic field is removed, the inductor (12) remains raised with respect to the substrate (14).

L'invention concerne un inducteur planaire surélevé sur la puce (12), fabriqué sur un substrat (14). L'inducteur (12) est disposé en relief sur le substrat (14), à l'exception d'une extrémité d'anrage (24), de préférence par application d'un champ magnétique sur une couche magnétique (38) formée sur l'inducteur (12). Le soulèvement de l'inducteur (12) déforme une région de courbure en plastique. Après retrait du champ magnétique, l'inducteur (12) reste surélevé relativement au substrat (14).

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