Rapid thermal process for obtaining silica coatings

Details Rapid thermal process for obtaining silica coatings Rapid thermal process for obtaining silica coatings

B - Operations, Transporting

05

D

B05D 3/02 (2006.01) B05D 3/06 (2006.01) C23C 18/12 (2006.01) C23C 20/08 (2006.01) H01L 21/312 (2006.01) H01L 21/316 (2006.01) H05K 3/28 (2006.01) H01L 21/314 (2006.01)

Patent

CA 2043411

A RAPID THERMAL PROCESS FOR OBTAINING SILICA COATINGS ABSTRACT The present invention is based on the discovery that rapid thermal processing (RTP) can convert hydrogen silsesquioxane resin coatings to ceramic silica coatings. This technique is especially valuable for the application of protective and dielectric layers on electronic devices.

Affiliated with

Also associated with

Rating

Rapid thermal process for obtaining silica coatings does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Rapid thermal process for obtaining silica coatings, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Rapid thermal process for obtaining silica coatings will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1915773