Rare gas-halogen excimer laser

Details Rare gas-halogen excimer laser Rare gas-halogen excimer laser

H - Electricity

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H01S 3/22 (2006.01) H01S 3/03 (2006.01) H01S 3/036 (2006.01) H01S 3/038 (2006.01) H01S 3/225 (2006.01)

Patent

CA 1311548

ABSTRACT OF THE INVENTION A rare gas-halogen excimer laser in which the laser gases are exposed virtually only to metal and ceramic, thereby reducing contamination of the gases and optics. In one preferred embodiment, magnetic fluid seals are used to isolate the bearings supporting the shaft upon which the tangential fan rotates so that the lubricated bearings do not contaminate the laser gases. The fan uses magnetic coupling so that an isolating enclosure may be placed over the seal to prevent the leakage of gases into the environment should the seal fail. An excimer laser that is therefore both safe enough to be used in medical and industrial applications as well as reliable may be fabricated.

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