Reaction vessel for depositing semi-conductor material

Details Reaction vessel for depositing semi-conductor material Reaction vessel for depositing semi-conductor material

C - Chemistry, Metallurgy

30

B

148/2.1

C30B 15/02 (2006.01) C30B 25/08 (2006.01)

Patent

CA 1055817

A B S T R A C T A reaction vessel is disclosed for depositing semi-conductor material from the gaseous phase onto heated carrier elements. The vessel consists of a metal baseplate, a quartz or glass bell placed thereon, and an autoclave including the bell and the joint thereof with the baseplate, and filled with inert compressed gas. The autoclave is provided with an instrument for moni- toring the pressure therein and acts as a safety device in the event of a drop in pressure.

211714

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