Reactive sputtering apparatus and supply leads therefor

Details Reactive sputtering apparatus and supply leads therefor Reactive sputtering apparatus and supply leads therefor

H - Electricity

01

J

204/167.4

H01J 37/34 (2006.01) C23C 14/34 (2006.01) H01B 7/24 (2006.01)

Patent

CA 1030487

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