Reactor system and method for forming uniformly large...

Details Reactor system and method for forming uniformly large... Reactor system and method for forming uniformly large...

C - Chemistry, Metallurgy

01

B

23/389, 148/2.3

C01B 33/02 (2006.01) C01B 33/035 (2006.01) C23C 16/24 (2006.01) C30B 28/14 (2006.01)

Patent

CA 1308538

A REACTOR SYSTEM AND METHOD FOR FORMING UNIFORMLY LARGE-DIAMETER POLYCRYSTALLINE RODS BY THE PYROLYSIS OF SILANE ABSTRACT In the reactor vessel in which silicon is deposited upon, a plurality of heated filament silicon starter rods vertically disposed within the reactor, each filament rod is confined within a elongated chamber, extending vertically within each chamber having an open bottom end and a longitudinal axis substantially concentric with the rod. Exhausted gas from the vessel is recycled to filter out silicon powder. The recycled gas is fed separately into each chamber from the bottom end thereof with the recycled gas being substantially directed at the longitudinal axis of the chamber. Such recycle of the gas produces uniform polycrystalline growth of high-quality surface morphology. The method and apparatus in which it is carried out permits substantially increased rates of production, realized without limitation in rod diameter size other than for practical reasons.

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