Reagent source for molecular beam epitaxy

Details Reagent source for molecular beam epitaxy Reagent source for molecular beam epitaxy

C - Chemistry, Metallurgy

30

B

356/182, 148/2.4

C30B 25/14 (2006.01)

Patent

CA 1325371

ABSTRACT REAGENT SOURCE FOR MOLECULAR BEAN EPITAXY A source assembly adapted to provide one or more metal organic compounds into an MBE reaction chamber wherein the source assembly comprises a mixer manifold which has one or more inlet connectors for providing the metal organic compounds. Each inlet connector includes a resistance valve for defining a flow rate of vapour of the metal organic compound under a pre-set pressure gradient and an on/off valve for selecting the operational status of the source. Preferably the mixer manifold acts as a collimator which avoids the need to fit a rotating substrate.

562380

Affiliated with

Also associated with

Rating

Reagent source for molecular beam epitaxy does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Reagent source for molecular beam epitaxy, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reagent source for molecular beam epitaxy will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1219205