Real time holographic interferometric testing of hybrid...

Details Real time holographic interferometric testing of hybrid... Real time holographic interferometric testing of hybrid...

G - Physics

01

R

356/117

G01R 31/26 (2006.01)

Patent

CA 1180467

ABSTRACT Apparatus for non-destructive testing or reliability testing of hybrid microcircuits using holographic interferometric techniques. A real time holographic analysis is used at the same time the circuit to be tested is energized. The surface displacements, due to thermal changes, are monitored holographically within the loaded circuit.

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