Rectilinearly deflectable element fabricated from a single...

Details Rectilinearly deflectable element fabricated from a single... Rectilinearly deflectable element fabricated from a single...

G - Physics

01

L

73/119, 356/200,

G01L 1/14 (2006.01) G01P 15/08 (2006.01) G01P 15/125 (2006.01)

Patent

CA 1332883

A suspended element etched in a silicon substrate which is deflected in linear proportion to an applied force. A pair of flexing means symmetrically positioned around the suspended element provides rectilinear movement of the suspended element in response to the applied force. In one embodiment of the invention, the flexing means is formed in a single etchant step by concurrently etching nearly identical recesses into opposing planar surfaces of the silicon substrate. In this embodiment, the portions of silicon remaining between the recesses and planar surfaces define the flexing means.

581600

Affiliated with

Also associated with

Rating

Rectilinearly deflectable element fabricated from a single... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Rectilinearly deflectable element fabricated from a single..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Rectilinearly deflectable element fabricated from a single... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1339748