Reduced capacitance electrode assembly

Details Reduced capacitance electrode assembly Reduced capacitance electrode assembly

H - Electricity

05

H

345/23, 345/61

H05H 1/46 (2006.01) H01J 37/32 (2006.01) H01L 31/02 (2006.01)

Patent

CA 1188399

ABSTRACT A reduced capacitance electrode assembly for use in an alternating current plasma system pro- vides reduced input capacitance to an associated tuning network. The assembly includes an elec- trode adapted to receive alternating current power for maintaining a plasma region and a plurality of electrically conductive plates. The plates are closely spaced apart by less than a predetermined distance on one side of the electrode for preclud- ing the formation of a plasma region on the one side of the electrode and for providing a plu- rality of series capacitances to present a sub- stantially reduced capacitance to the alternating current power. The reduced capacitance electrode assembly is particularly useful in a system for making photo- voltaic devices wherein a plurality of amorphous semiconductor materials are deposited onto a con- tinuous conductive substrate moving through a corresponding plurality of deposition chambers. At least one of the chambers includes a reduced capacitance electrode assembly comprising an elec- trode spaced from the substrate adapted to receive alternating current power for establishing a plasma between the electrode and the substrate, and a plurality of electrically conductive plates being closely spaced apart on the side of the electrode opposite the substrate for confining the plasma between the electrode and the substrate and for providing a plurality of series coupled gape- citances to present a substantially reduced capa- citance to the alternating current power.

432372

Affiliated with

Also associated with

Rating

Reduced capacitance electrode assembly does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Reduced capacitance electrode assembly, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reduced capacitance electrode assembly will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1288738