Regulation of pyrocarbon coating

B - Operations – Transporting – 01 – J

Patent

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B01J 8/24 (2006.01) C23C 14/52 (2006.01) C23C 16/44 (2006.01) C23C 16/442 (2006.01)

Patent

CA 2184729

Deposition of a pyrocarbon coating of precise thickness onto one or more substrates being levitated along with a bed of particles in a fluidized bed coating enclosure is accomplished by varying the amount of hydrocarbon supplied to the bed as a part of an upward levitating flow to compensate for changes which are detected in the size of the fluidized bed. Increases and decreases in the size of the bed are detected by monitoring either the differential pressure above and below the bed or the weight of the bed, and compensating changes are made to return the bed to its desired size by changing the flow rate of hydrocarbon. For example, when a growth in bed size is detected that is not attributable to an aberration in either particle supply or withdrawal, the amount of hydrocarbon being supplied to the bed is decreased so as to cause the size of the bed to gradually return to its desired value.

On dépose un revêtement de pyrocarbone d'une épaisseur précise sur un ou plusieurs substrats en lévitation au moyen d'un lit de particules dans une enceinte à lit fluidisé, en modifiant la quantité d'hydrocarbure envoyée dans le lit en tant que composante du fluide de suspension, afin de compenser les changements détectés dans la hauteur du lit fluidisé. Les augmentations et les diminutions de hauteur du lit fluidisé sont détectées en mesurant la différence de pression au-dessus et en dessous du lit ou en déterminant le poids du lit. On redonne au lit la hauteur souhaitée en modifiant le débit de l'hydrocarbure. Par exemple, lorsqu'on détecte une augmentation de la hauteur du lit qui ne peut pas être attribuée à une anomalie au niveau de l'alimentation ou de l'évacuation des particules, on diminue la quantité d'hydrocarbure fournie au lit, jusqu'à ce que celui-ci revienne graduellement à sa hauteur souhaitée.

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