B - Operations – Transporting – 23 – K
Patent
B - Operations, Transporting
23
K
B23K 26/36 (2006.01) B01J 19/12 (2006.01) B08B 5/00 (2006.01) B08B 7/00 (2006.01) B81C 1/00 (2006.01) C23G 5/00 (2006.01) H01L 21/00 (2006.01) H01L 21/263 (2006.01)
Patent
CA 2570713
An apparatus and method for selectively removing undesired material from the surface of a substrate provides a flow of inner gas over the undesired material substrate surface while irradiating the undesired material with energetic photons. The invention enables removal of undesired material without altering the physical properties of the material underlying or adjacent be removed, undesired material. Removal effectiveness may be enhanced by utilitizing polarized energetic photons. Directing a laser beam to the backside of a transparent substrate may enhance the effectiveness of the removal.
Engelsberg Audrey
Johnson Andrew
Parker William
Blake Cassels & Graydon Llp
Cauldron Limited Partnership
LandOfFree
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