Removal of material by radiation applied at an oblique angle

Details Removal of material by radiation applied at an oblique angle Removal of material by radiation applied at an oblique angle

B - Operations, Transporting

23

K

B23K 26/14 (2006.01) B08B 7/00 (2006.01) H01L 21/306 (2006.01)

Patent

CA 2259910

An apparatus (10) and method for removing undesired material from the surface of a substrate (12) provides a flow (18) of inert gas over the undesired material substrate surface while irradiating (11) the undesired material with energetic photons directed at an angle (8) that is oblique to the substrate (12). The invention enables removal of undesired material without altering the physical properties of the material underlying or adjacent the removed, undesired material. In certain circumstances, the non-perpendicular incidence permits effective removal where normal incidence caused damage to the substrate or poor removal or both.

Cette invention se rapporte à un appareil (10) et à un procédé d'extraction de matière indésirable de la surface d'un substrat (12). Ledit procédé consiste à amener un courant (18) de gaz inerte à la surface du substrat comportant la matière indésirable tout en irradiant (11) ladite matière indésirable avec des photons énergétiques suivant une direction formant un angle (8) oblique avec le substrat (12). Cette invention permet d'extraire la matière indésirable sans modifier les caractéristiques physiques de la matière sous-jacente ou adjacente à ladite matière indésirable. Dans certains cas, l'incidence non perpendiculaire permet une extraction efficace là où une incidence perpendiculaire endommageait le substrat et/ou ne permettait qu'une extraction faible de matière indésirable.

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