Removal of surface contaminants by irradiation from a...

Details Removal of surface contaminants by irradiation from a... Removal of surface contaminants by irradiation from a...

H - Electricity

01

L

204/91, 327/1.4

H01L 21/268 (2006.01) B08B 7/00 (2006.01) B23K 26/14 (2006.01) G03F 7/20 (2006.01) H01L 21/00 (2006.01) H01L 21/306 (2006.01) H01L 21/3205 (2006.01) H01L 21/321 (2006.01) H01L 21/768 (2006.01)

Patent

CA 1328908

ABSTRACT OF THE DISCLOSURE A method and apparatus for removing surface contaminants from the surface of a substrate by high-energy irradiation is provided. The invention enables removal of surface contaminants without altering of the substrate's underlying molecular structure. The source of high-energy irradiation may comprise a pulsed laser.

605060

Affiliated with

Also associated with

Rating

Removal of surface contaminants by irradiation from a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Removal of surface contaminants by irradiation from a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Removal of surface contaminants by irradiation from a... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1323444