Replication tools and related fabrication methods and apparatus

H - Electricity – 01 – L

Patent

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H01L 21/18 (2006.01)

Patent

CA 2595713

Durable seamless replication tools are disclosed for replication of seamless relief patterns in desired media, for example in optical recording or data storage media. Methods of making such durable replication tools are disclosed, including preparing a recording substrate on the inner surface of a support cylinder, recording and developing a relief pattern in the substrate, creating a durable negative relief replica of the pattern, extracting the resulting durable tool sleeve from a processing cell, and mounting the tool sleeve on a mounting fixture. Apparatus are disclosed for fabricating such seamless replication tools, including systems for recording a desired relief pattern on a photosensitive layer on an inner surface of a support cylinder. Also disclosed are electrodeposition cells for forming a durable tool sleeve having a desired relief pattern. The replication tool relief features may have critical dimensions down to the micron and nanometer regime.

L'invention concerne des outils de réplication uniformes durables destinés à répliquer des motifs de relief uniformes dans des supports souhaités, par exemple dans un support de stockage de données ou d'enregistrement optique. Des procédés de fabrication de ces outils de réplication durables consistent à préparer un substrat d'enregistrement sur la surface interne d'un cylindre support, à enregistrer et à développer un motif de relief dans le substrat, à créer une réplique de relief négatif durable du motif, à extraire le corps de l'outil durable obtenu d'une cellule de traitement et à monter le corps de l'outil sur une installation de montage. L'appareil destiné à fabriquer ces outils de réplication uniformes, comprend des systèmes destinés à enregistrer un motif de relief souhaité sur une couche photosensible d'une surface interne d'un cylindre support. L'invention concerne également des cellules d'électrodéposition destinées à former un corps d'outil durable possédant un motif de relief souhaité. Les caractéristiques de relief de l'outil de réplication peuvent avoir des dimensions critiques jusqu'au régime du micron et du nanomètre.

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