Resist composition and process for producing the same

Details Resist composition and process for producing the same Resist composition and process for producing the same

G - Physics

03

F

G03F 7/004 (2006.01) G03F 7/16 (2006.01)

Patent

CA 2085405

ABSTRACT OF THE DISCLOSURE This invention provides a process for producing a resist composition in which the content of relatively large undissolved particles is low just after production of the composition and the content of relatively large undissolved particles increases only to a small extent even if the composition is stored for a long period of time. Thus, this invention provides a process for producing a resist composition which comprises filtering a mixture of an alkali-soluble resin, a radiation-sensitive compound and a solvent by the use of a filter of which pore diameter is 0.1 µm or below and of which particle-removing performance is 99% or above. Further, this invention provides also a resist composition comprising an alkali-soluble resin, a radiation-sensitive compound and an organic solvent not simultaneously having both acetoxy group and alkoxy group in its molecule, said composition containing undissolved particles having a particle diameter of 0.25 µm or above in a number of 100 particles/ml or below, said undissolved particles being constituted of two particle groups one of which (the first group) has a particle diameter of 0.25-0.3 µm and the other of which (the second group) has a particle diameter larger than 0.3 µm, and the content of said first particle group having a particle diameter of 0.25-0.3 µm being 50 particles/ml or below. According to the process of this invention, a resist composition excellent in storage stability, etc. can be obtained. By using said resist composition, the product yield in the production of integrated circuit can be improved.

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