Resist compositions and use

Details Resist compositions and use Resist compositions and use

G - Physics

03

F

96/150

G03F 7/004 (2006.01)

Patent

CA 1332119

RESIST COMPOSITIONS AND USE ABSTRACT OF THE DISCLOSURE A spinnable or solution castable composition is provided utilizing a commercially available base resin such as a novolac which is a water or aqueous base, soluble, a dissolution inhibitor having chemically combined acid labile groups and an aryl onium salt.

561112

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