H - Electricity – 01 – J
Patent
H - Electricity
01
J
31/190, 204/96.1
H01J 37/34 (2006.01) C23C 14/00 (2006.01) C23C 14/06 (2006.01) H01B 1/06 (2006.01) H01C 17/12 (2006.01)
Patent
CA 985036
Hayakawa Shigeru
Hosomi Fumio
Wasa Kiyotaka
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