Resonant mirror and method of manufacture

Details Resonant mirror and method of manufacture Resonant mirror and method of manufacture

G - Physics

02

B

G02B 26/00 (2006.01) G02B 26/08 (2006.01)

Patent

CA 2084946

A resonant mirror is disclosed which comprises a deflectable mirror (16) generally planar with the top surface of a substrate. The mirror is suspended adjacent the top surface by at least two supporting elements (20). At least one supporting element is displaced from an edge of the mirror. The supporting elements (20), being collinear, define an axis of rotation (24) about which the mirror may oscillate to steer incident light through an angle.

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