Resonant probe driving arrangement and scanning probe...

G - Physics – 05 – D

Patent

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Details

G05D 19/00 (2006.01) G01Q 30/06 (2010.01) G01D 3/028 (2006.01)

Patent

CA 2406407

A drive system is provided for a resonating probe (23) device, such as a scanning probe microscope, wherein the amplitude of the drive signal is controlled by feeding back a phase shifted and amplified component (70,37,40) of the amplitude of oscillation of the resonating element, wherein a low pass filter (70) is used. Means are provided for electronically enhancing the quality factor of a resonating probe device when operated in a liquid environment. Such enhancement of the quality factor improves the sensitivity of the probe device. A frequency phase locked loop PLL is used (36,38,32) to follow a change of the resonant frequency in a fluid environment.

L'invention concerne un système d'entraînement pour un dispositif à sonde à résonance, tel qu'un microscope à sonde à balayage. Dans ce dispositif, l'amplitude du signal d'entraînement est contrôlée en renvoyant une composante de l'amplitude d'oscillation de l'élément de résonance, amplifiée et déphasée. Des moyens sont prévus pour améliorer de manière électronique le facteur de qualité d'un dispositif à sonde à résonance utilisé dans un environnement liquide. Une telle amélioration du facteur de qualité améliore la sensibilité du dispositif à sonde.

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