Reticle container with corner holding

Details Reticle container with corner holding Reticle container with corner holding

H - Electricity

01

L

H01L 21/68 (2006.01) G03F 7/20 (2006.01) H01L 21/027 (2006.01) H01L 21/673 (2006.01) H01L 21/70 (2006.01)

Patent

CA 2188196

A cassette or box (10) for containing and holding a planar substrate such as a reticle having a clamp bar (14) coupled to corner supports (20, 34) by a spring or flexure (16) and a linkage (28, 30, 32). The clamp bar (10) is pivotally attached to bottom corner supports (20) and a spring or flexure (16) and linked to a top corner support (34), such that movement of the clamp bar (14) causes the corner supports (20, 34) to pivot away from a reticle being held only at the corners. An elevation bar (38) is also used to preposition the reticle in one direction. The present invention greatly facilitates the positioning and handling of a reticle as used in photolithography to manufacture semiconductor devices. Additionally, the present invention greatly reduces particulate contamination.

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