Reticle frame assembly

Details Reticle frame assembly Reticle frame assembly

G - Physics

03

F

356/194

G03F 9/00 (2006.01) G03F 7/20 (2006.01)

Patent

CA 1297598

Abstract of the Disclosure A frame for a reticle or mask used in making integrated circuits, and capable of precisely positioning and holding a reticle in the X, Y and Z axis with a minimum of bending comprises a frame, and alignment device mounted on said frame for positioning the reticle along the Z-axis, and a further device for adjustably positioning the reticle along the Y-axis. A Y-axis transversly compliant axial loading spring's mounted on said frame opposite the Y-axis adjusting device. Also provided is an X-axis adjusting device, mounted on said frame for adjustably positioning the reticle along the X-axis, and an X-axis transversly compliant axial loading spring mounted on said frame opposite said X-axis adjusting device.

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