G - Physics – 03 – B
Patent
G - Physics
03
B
26/112, 26/18, 3
G03B 41/00 (2006.01) B23Q 1/38 (2006.01) F16C 29/02 (2006.01) G01B 5/00 (2006.01) G03F 7/20 (2006.01)
Patent
CA 1271313
ABSTRACT The described invention is a precisely adjustable transporter for moving a reticle past an optical slit as a step in the production of semiconductor wafers. The reticle stage rides along a pair of optically flat planar, intersecting bearing surfaces supported by air bearings on each bearing surface. Pressurized air and vacuum may be simultaneously employed to effect substantially friction-free motion while preventing displacement from the bearing surfaces. Axial adjustments on each air bearing permit precise adjustment of the reticle stage and reticle.
538882
Engelbrecht Orest
Laganza Joseph L.
Osler Hoskin & Harcourt Llp
Svg Lithography Systems Inc.
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