Rf mems switch a flexible and free switch membrane

H - Electricity – 01 – H

Patent

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Details

H01H 1/00 (2006.01) H01H 59/00 (2006.01)

Patent

CA 2602187

The RF MEMS switch comprising micromechanical switching means that are carried by a substrate (1) and that can be actuated between two positions: a first position (off-state/ figure 1) and a second position (on- state), and actuation means for actuating the position of the switching means. The micromechanical switching means comprise a flexible membrane (6) which is freely supported by support means (3), which is bendable under the action of the actuation means (7), and which can freely slide relatively to the support means (3) during its bending movement.

Commutateur MEMS RF comprenant des moyens de commutation micromécaniques qui sont portés par un substrat (1) et qui peuvent être actionnés entre deux positions : une première position (état éteint/ figure 1) et une seconde position (état allumé), et des moyens actionneurs pour établir la position des moyens de commutation. Les moyens de commutation micromécaniques comprennent une membrane flexible (6) qui est librement soutenue par des moyens de soutien (3), qui est flexible sous l~action des moyens actionneurs (7), et qui peut glisser librement par rapport aux moyens de soutien (3) pendant son mouvement de flexion.

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