Rotary developer and method for its use

Details Rotary developer and method for its use Rotary developer and method for its use

H - Electricity

01

L

356/138, 356/192

H01L 21/70 (2006.01) G03F 7/30 (2006.01)

Patent

CA 1286797

TITLE PE-0027 A ROTARY DEVELOPER AND A METHOD FOR ITS USE ABSTRACT OF THE DISCLOSURE A rotary developer for removing unhardened portions of a layer of an electronic part to form vias in the part. The developer orbits the layer about an axis in one direction while rotating the layer in an opposite direction eliminating leading and trailing edge effects on vias.

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