Rotary electrostatic microactuator

H - Electricity – 02 – N

Patent

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Details

H02N 1/00 (2006.01) G02B 6/35 (2006.01) G11B 7/085 (2006.01) G11B 11/105 (2006.01)

Patent

CA 2354604

A rotary electrostatic microactuator (101) that includes a substantially planar substrate (102) and a rotatable member (103) overlying the substrate for rotation about an axis of rotation (108) extending perpendicular to the planar substrate. First and second spaced-apart springs (113, 114) and a plurality of comb drive assemblies (106, 107) are included. Each of the comb drive assemblies has a first comb drive member (111) mounted on the substrate and a second comb drive member (112). Each of the first and second comb drive members are provided with arcuate comb drive fingers (123, 127). Each of the first and second springs has a first end portion (131a) secured to the substrate and a second end portion (132b) secured to at least one of the second comb drive members for suspending the second comb drive members and the rotatable member over the substrate. The second comb drive members are movable in a direction of travel about the axis of rotation between a first position in which the comb drive fingers of the first and second comb drive members are not substantially fully interdigitated and a second position in which the comb drive fingers of the first and second comb drive members are substantially fully interdigitated.

La présente invention concerne un microactionneur électrostatique rotatif (101) qui comprend un substrat sensiblement plat (102) ainsi qu'un élément rotatif (103) recouvrant le substrat et pouvant pivoter autour d'un axe de rotation (108) s'étendant perpendiculairement par rapport audit substrat. Ce microactionneur comprend également un premier et un second ressort séparés (113, 114) ainsi que plusieurs montages de commande en peigne (106, 107). Chaque montage possède un premier élément de commande en peigne (111) fixé au substrat et un second élément de commande en peigne (112). Chacun desdits éléments est muni de doigts de commande arqués (123, 127). Chaque ressort possède une première extrémité (131a) fixée au substrat ainsi qu'une seconde extrémité (132b) fixée à au moins un des seconds éléments de commande en peigne, permettant de suspendre au-dessus du substrat les seconds éléments de commande en peigne ainsi que l'élément rotatif. Lesdits seconds éléments peuvent être déplacés autour de l'axe de rotation, entre une première position où les doigts des premiers et seconds éléments de commande en peigne ne sont pas complètement interdigités et une seconde position où les doigts desdits premiers et seconds éléments sont complètement interdigités.

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