C - Chemistry – Metallurgy – 30 – B
Patent
C - Chemistry, Metallurgy
30
B
C30B 25/12 (2006.01) C23C 14/50 (2006.01) C23C 16/44 (2006.01) C23C 16/458 (2006.01)
Patent
CA 2206828
A device comprising a flat susceptor (14) rotating parallel to a reference surface (30) about a rotary shaft (20) perpendicular to this surface and comprising means for obtaining the stability of the susceptor held in sustentation and means for obtaining its rotary movement, is characterized in that these means are constituted by the integrated ferromagnetic elements (11) in the susceptor, by the rotary shaft, by the reference surface with grooves or depressions (60, 62), by a magnetic actuating assembly of magnetic solenoids (74), by a gas inlet (40), by control electronics (80), and by optional sensors (82).
L'invention concerne un dispositif qui comprend un suscepteur plat (14) tournant parallèlement à une surface de référence (30) autour d'un axe (20) perpendiculaire à cette surface, ainsi que des moyens qui permettent d'assurer la stabilité du suscepteur en sustentation et d'obtenir son mouvement rotatif, constitués par des éléments ferromagnétiques intégrés (11) dans le suscepteur, un axe rotatif, une surface de référence pourvue de rainures ou de sillons (60, 62), un solénoïde magnétique formant un ensemble magnétique de commande (74), une admission de gaz (40), un système électronique de commande (80) et des capteurs facultatifs (82).
Tsai Charles Su-Chang
Bereskin & Parr
Tsai Charles Su-Chang
LandOfFree
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