Rotating magnetron incorporating a removable cathode

Details Rotating magnetron incorporating a removable cathode Rotating magnetron incorporating a removable cathode

C - Chemistry, Metallurgy

23

C

C23C 14/35 (2006.01) C23C 14/34 (2006.01) H01J 37/34 (2006.01)

Patent

CA 2094252

A rotatable magnetron having a cathode (64) and a bearing assembly (10) wherein the cathode (64) may be removed from a coating chamber (42) while the bearing assembly (10) remains in place.

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