Sample carriage for scanning probe microscope

G - Physics – 02 – B

Patent

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Details

G02B 21/26 (2006.01) G01B 7/28 (2006.01) H01J 37/20 (2006.01)

Patent

CA 2107048

A sample carriage, for receiving a sample to be scanned and positionable in a scanning probe microscope, is used for physically decoupling the sample from the scanning probe microscope assembly. The sample carriage, constructed from low thermal coefficient material, is physically decoupled by releasably clamping a sample carriage to a bridge support.

Porte-objet destiné à recevoir et à positionner un échantillon destiné à l'examen par un microscope électronique à balayage; le porte-objet en question est utilisé pour découpler physiquement l'échantillon des composants du microscope électronique à balayage. Le porte-objet, fabriqué d'un matériau à faible coefficient thermique, est physiquement découplé par utilisation d'un support de pontage.

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