Sapphire substrates and methods of making same

B - Operations – Transporting – 24 – B

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B24B 7/22 (2006.01) H01L 33/00 (2006.01) B24B 37/04 (2006.01)

Patent

CA 2673662

A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 µm/cm2, wherein nTTV is total thickness variation normalized for surface area of teh generally planar surface, the substrate having a diameter not less than about 9.0 cm.

L'invention concerne un substrat de saphir comprenant généralement une surface planaire présentant une orientation cristallographique sélectionnée dans le groupe constitué d'orientations de plan a, de plan r, de plan m et de plan c, et présentant une nTTV inférieure ou égale à environ 0,037 µm/cm2, nTTV représentant la variation d'épaisseur totale normalisée pour une surface active de la surface généralement planaire, le substrat présentant un diamètre supérieur ou égal à environ 9,0 cm.

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