Saw devices with reflection-suppressing fingers

Details Saw devices with reflection-suppressing fingers Saw devices with reflection-suppressing fingers

H - Electricity

03

H

349/59.1

H03H 9/02 (2006.01)

Patent

CA 1254994

SAW DEVICES WITH REFLECTION-SUPPRESSING FINGERS Abstract of the Disclosure Each IDT (inter-digital transducer) of a SAW (surface acoustic wave) device has a linearly tapered back edge formed by reflection-suppressing fingers of successively decreasing length spaced apart with a pitch of lambda/4 behind the active region of the IDT, where lambda is the wavelength of a SAW to be propagated, whereby SAW reflections at the back edge of the IDT are substantially eliminated. A thin resistive doped silicon film between the back edge of each IDT and the adjacent edge of the substrate absorbs waves propagated via this back edge. The film underlies the IDTs to provide improved adhesion to the substrate.

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