Scanning apparatus, particularly to be used in producing...

Details Scanning apparatus, particularly to be used in producing... Scanning apparatus, particularly to be used in producing...

H - Electricity

01

L

356/192

H01L 21/70 (2006.01) G02B 26/10 (2006.01) G03B 27/00 (2006.01) G03F 7/20 (2006.01)

Patent

CA 1060124

ABSTRACT OF THE DISCLOSURE A scanning apparatus is disclosed for providing rapid and accurate mechanical line scanning of flat surfaces, Previously known devices of this kind are less accurate, heavier devices having heavier wear during use, The present device is particularly useful in generating patterns in masks intended for manufacturing micro circuits and has a radiation source with a sensitive medium, and a means for providing a relative movement between the radiation source and the medium. This means comprises a first slide arranged for comparatively slow movement in a first direction and a second slide arranged for comparatively rapid reciprocating movement in a second direc- tion for scanning a surface of the radiation medium by means of a beam from the radiation source, A first driving device drives the first slide and a second driving device drives the second slide, characterized in that the second slide is arranged to constitute an oscillating mass in a mechanical oscillating system.

245879

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