Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

H - Electricity

01

J

358/10.1

H01J 37/28 (2006.01) H01J 37/04 (2006.01)

Patent

CA 1141481

PHD 79.059 7 4.4.1980 ABSTRACT: Scanning electron microscope. A scanning electron microscope, comprising an electron gun, an electron-optical column which comprises an anode for accelerating the electrons, a specimen holder for accommodating and positioning the specimen to be examined being arranged underneath said column, and also comprising a detector for detecting the electrons emerging from the specimen. The detector is connected to a display apparatus for the display of an image of the specimen by way of, for example, detected electrons. Between the electron-optical column and the specimen holder there is arranged a brake electrode. An adjustable voltage which reduces the velocity of the electrons emerging from the electron-optical column can be applied between the brake electrode and the anode.

352517

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