Scanning electron microscope calibration apparatus and...

Details Scanning electron microscope calibration apparatus and... Scanning electron microscope calibration apparatus and...

G - Physics

01

B

354/25

G01B 15/00 (2006.01) H01J 37/28 (2006.01)

Patent

CA 1203905

Abstract of the Disclosure A method and apparatus for making precise measurements as small as in submicron distances of an object or specimen includes a stage which is movable under the con- trol of a microprocessor . An instrument, such as a scanning electron microscope scans the object to obtain a first scan representation thereof. The stage is then shifted a precise known distance and a second scan is made thereof. The results of the two scans are stored and compared by the microprocessor to determine the ap- parent magnitude of the stage shift in arbitrary units. This apparent magnitude is then equated to the known precise shift distance to calibrate the arbitrary units. The microprocessor can then calculate the desired measure- ment from the data of either of the two scans stored therein.

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