Scanning electron microscope for visualization of wet samples

Details Scanning electron microscope for visualization of wet samples Scanning electron microscope for visualization of wet samples

H - Electricity

01

J

358/10.1

H01J 37/28 (2006.01)

Patent

CA 1295056

SCANNING ELECTRON MICROSCOPE FOR VISUALIZATION OF WET SAMPLES ABSTRACT OF TEE DISCLOSURE A scanning electron microscope useful for obtaining microscopic data or images of wet specimens is provided which comprises an electron source capable of emitting a beam of electrons; an electron optical vacuum column with means for focussing the beam of electrons; means for scanning the focussed beam of electrons across a specimen; a differentially pumped aperture column attached tothe electron optical vacuum column and having at least two walls perpendicular to the sides of the differentially pumped aperture column defining a suitable series of pressure gradients, each wall having an aperture aligned to permit the beam of electrons to pass through said differentially pumped aperture column; a specimen chamber which may be maintained at normal atmospheric pressure; a specimen mount; means of preventing the buildup of negative charge on the surface of the specimen; and a detector and image recording system.

556003

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