Scanning electron microscope sample cooling device

Details Scanning electron microscope sample cooling device Scanning electron microscope sample cooling device

F - Mech Eng,Light,Heat,Weapons

25

D

62/3

F25D 31/00 (2006.01) F25D 3/10 (2006.01) H01J 37/20 (2006.01)

Patent

CA 1185106

ABSTRACT A cooling device for use with a cryogenic cooling system to maintain a sample at cryogenic temperatures inside the vacuum chamber of a scanning electron microscope during observation is described. The cooling device is made of a thermally conductive material and has a recess for mounting a sample holder, and a passage extending around the recess. A pair of flexible hoses are connected to opposite ends of the cooling device for permitting liquid nitrogen to flow through the passage. By removing heat from the sample, sample holder and cooling device the liquid nitrogen vapourises and the vapour pressure produced causes vapour to flow out of the device and through one of the flexible hoses to remove heat from the sample and maintain it at a cryogenic temperature. The hoses are corrugated and permit multidirectional movement of the cooling device. In practice cryogenic temperatures as low as -190°C have been obtained.

428070

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