Scanning electron microscope with eddy-current compensation

Details Scanning electron microscope with eddy-current compensation Scanning electron microscope with eddy-current compensation

H - Electricity

01

J

358/10.1

H01J 37/28 (2006.01) H01J 37/147 (2006.01) H01J 37/24 (2006.01)

Patent

CA 1099824

ABSTRACT OF THE DISCLOSURE In a scanning charged particle microprobe, such as a stereoscopic scanning electron microscope, a plurality of RC circuits for generating an exponentially decaying electrical signal are connected to an oscillator for generating a step function signal. The exponentially decaying signal and the step function signal are summed and applied to the microprobe to cause the beam of charged particles to deflect in a step function which has been compensated for the effects of eddy current induced fields.

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