Scanning-image forming apparatus using photo response signal

H - Electricity – 04 – N

Patent

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375/1, 356/188,

H04N 7/00 (2006.01) G01R 31/265 (2006.01) G01R 31/308 (2006.01) H04N 1/409 (2006.01)

Patent

CA 1181540

- 1 - Abstract: Apparatus for forming a scanning-image is so constructed that a photo-response signal obtained by scanning the surface of a semiconductor specimen with a photon beam is subjected to second differentiation. The displayed image employs the second derivative so formed as a modulation signal. The result is a higher resolving power than has hitherto been obtainable.

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