H - Electricity – 04 – N
Patent
H - Electricity
04
N
375/1, 356/188,
H04N 7/00 (2006.01) G01R 31/265 (2006.01) G01R 31/308 (2006.01) H04N 1/409 (2006.01)
Patent
CA 1181540
- 1 - Abstract: Apparatus for forming a scanning-image is so constructed that a photo-response signal obtained by scanning the surface of a semiconductor specimen with a photon beam is subjected to second differentiation. The displayed image employs the second derivative so formed as a modulation signal. The result is a higher resolving power than has hitherto been obtainable.
387958
Kohno Hideki
Munakata Chusuke
Hitachi Ltd.
Kirby Eades Gale Baker
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