Scanning microscope comprising force-sensing means

Details Scanning microscope comprising force-sensing means Scanning microscope comprising force-sensing means

G - Physics

01

Q

G01Q 60/00 (2010.01) G01Q 10/04 (2010.01) G01Q 30/04 (2010.01) G01Q 60/06 (2010.01) G01Q 60/38 (2010.01) H01L 21/66 (2006.01) G01B 5/20 (2006.01) G12B 21/06 (2006.01)

Patent

CA 2075855

A scanning, imaging system is described. A probe 10 having a fine tip 70 is disposed adjacent the surface of a sample 30 and scanned in a pattern lying in a plane substantially parallel to the surface. Means 40, 50 are provided for oscillating the probe tip, substantially within the scanning plane. Shear forces, acting upon the probe tip in a substantially lateral direction, cause changes in the oscillation of the probe tip. Such changes are detected by a position-sensitive photodetector 80.

Affiliated with

Also associated with

Rating

Scanning microscope comprising force-sensing means does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning microscope comprising force-sensing means, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning microscope comprising force-sensing means will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1507261