G - Physics – 01 – Q
Patent
G - Physics
01
Q
G01Q 60/06 (2010.01) G12B 21/06 (2006.01)
Patent
CA 2120975
- ABSTRACT OF THE DISCLOSURE An apparatus capable of measuring the topography and the optical characteristics of the surface of a sample at high resolution irrespective of the transmittance and the conductivity of the sample is realized. The apparatus comprises a probe, a light source for illuminating a sample with light, a photoelectric converter device and optics for receiving light transmitted through the sample or light reflected by the sample, a laser emitting laser light for detecting deflections of the probe, a condenser lens for directing the laser light to the rear surface of the probe, a detection system for detecting reflected light, a rough-motion mechanism and a fine-motion mechanism for moving the sample and the probe relative to each other, a control means for controlling the distance between the sample and the probe, and a computer for controlling the whole apparatus. The probe has a front end portion and a light- propagating body continuous with the front end portion. The front end portion and the light-propagating body are shaped like a hook. The apparatus observes the topography and the optical characteristics of the surface of the sample.
Ataka Tatsuaki
Chiba Norio
Fujihira Masamichi
Muramatsu Hiroshi
Borden Ladner Gervais Llp
Seiko Instruments Inc.
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