Scanning probe microscope

Details Scanning probe microscope Scanning probe microscope

G - Physics

01

B

G01B 7/28 (2006.01) G01B 5/20 (2006.01) G01B 7/34 (2006.01) G11B 9/00 (2006.01)

Patent

CA 2070359

A scanning type probe microscope apparatus for measuring a surface state of a sample by scanning the sample by use of a probe is disclosed. In the apparatus, the sample is inclined relative to a scan direction of the probe by a inclination mechanism. Of a signal component corresponding to the surface state of the sample, a signal component having an optional space frequency is selected to be detected by a detecting circuit. The inclination mechanism is controlled on the basis of a detection result of the detecting circuit.

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