Scanning probe microscope

G - Physics – 01 – Q

Patent

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G01Q 10/02 (2010.01)

Patent

CA 2231310

A scanning probe microscope comprising: a probe equipped with a probe tip at its front end, a vibration application portion consisting of a piezoelectric vibrating body and an AC voltage-generating portion, a vibration-detecting portion consisting of a quartz oscillator and a current/voltage amplifier circuit, a coarse displacement means for bringing the probe close to a surface of a sample, a sample-to-probe distance control means consisting of a Z fine displacement element and a Z servo circuit, a two-dimensional scanning means consisting of an XY fine displacement element and an XY scanning circuit, a data processing means for converting a measurement signal into a three-dimensional image. The probe is held to the quartz oscillator by spring pressure of a resilient body.

Cette invention concerne un microscope à sonde de balayage comprenant : une sonde comportant une pointe à son extrémité avant, un organe de vibration composé d'un corps vibrant piézoélectrique et d'un générateur de tension en c.a., un détecteur de vibration composé d'un oscillateur à quartz et d'un circuit d'amplification de courant-tension, un moyen de déplacement grossier servant à approcher la sonde de la surface d'un échantillon, un moyen de réglage de la distance sonde-échantillon composé d'un élément de déplacement fin Z et d'un circuit d'asservissement Z, un moyen de balayage bi-dimensionnel composé d'un élément de déplacement fin XY et d'un circuit de balayage XY, un moyen de traitement des données servant à la conversion d'un signal de mesure en image tri-dimensionnelle. La sonde est maintenu contre l'oscillateur à quartz par la pression élastique d'un corps souple.

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