Scanning tunneling microscope

Details Scanning tunneling microscope Scanning tunneling microscope

G - Physics

01

Q

358/10.1

G01Q 10/00 (2010.01) G01Q 10/02 (2010.01) G01Q 30/18 (2010.01) B81B 3/00 (2006.01)

Patent

CA 1252918

A B S T R A C T Scanning Tunneling Microscope This scanning tunneling microscope consists of a semiconductor chip (7) into which slots are etched to form a central portion (1) linked by a first pair of stripes (2, 3) to an intermediate portion (4) which in turn is linked by a second pair of stripes (5, 6) to the main body of the chip (7). The pairs of stripes (2, 3; 5, 6) have mutually orthogonal directions to allow the center portion (1) to perform movements in x- and y-direc- tions under the control of electrostatic forces created between the stripes (2, 3; 5, 6) and their opposite walls. The center portion (1) has formed into it at least one tongue (17) carrying an integrated, protuding tunnel tip (18) which is capable of being moved in z-direction by means of electrostatic forces between said tongue (17) and the bottom of a cavity below the tongue (17).

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