Scanning tunneling microscope and surface topographic...

Details Scanning tunneling microscope and surface topographic... Scanning tunneling microscope and surface topographic...

H - Electricity

01

J

358/10.1

H01J 37/28 (2006.01) G01B 7/34 (2006.01) G01N 27/00 (2006.01)

Patent

CA 1315898

Abstract In a surface topographic observation method using a scanning tunneling microscope, a probe is moved away from the surface of a sample and is moved on a plane to successively move it to points of measurement on the surface of the sample in order to obtain texture information of the sample. That is, the probe is moved on a plane for preventing the probe tip from colliding with the surface of the sample and enabling the probe to effect scanning at high speed.

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