Scanning tunneling microscope, probe for the same, method of...

G - Physics – 01 – Q

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G01Q 60/16 (2010.01) G01Q 60/10 (2010.01) B82B 3/00 (2006.01)

Patent

CA 2342157

To provide a scanning tunneling microscope, a probe for use with the scanning tunneling microscope, a method of treating the probe, and a method of fabricating a nano-structure, which facilitate formation of a continuous nano-structure. A probe (2) for a scanning tunneling microscope formed of an Ag2S crystal having both ion conductivity and electron conductivity is provided. Voltage and tunnel current (6) are~ applied between the probe (2) and a substrate (3) in order to~ move movable Ag ions to thereby grow on the tip end of the probe (2) a projection (mini chip) composed of Ag ions or Ag atoms. The polarity of the applied voltage is reversed after the growth of the projection in order to return the Ag ions or Ag atoms constituting the grown projection (mini chip) into the Ag2S crystal to thereby contract the projection. Thus, the probe (2) can have a projection composed of Ag ions or Ag atoms and having a regulated shape. Further, the movable ions or atoms of the mixed- conductive material are transferred onto the substrate so as to form a nano-structure on the substrate.

L'invention concerne un microscope à balayage à effet tunnel capable de construire une structure fine continue, sa sonde, un procédé de traitement de la sonde et un procédé de production d'une structure fine. L'invention concerne également une sonde (2) destinée à un microscope à balayage à effet tunnel constitué d'un monocristal Ag2S à conductivité ionique et à conductivité électronique, une tension et un courant (6) à effet tunnel est appliqué entre la sonde (2) et un substrat (3) afin de déplacer les ions Ag précités et de tirer une partie saillante (minipuce) constituée d'ions Ag ou d'atomes Ag à l'extrémité de pointe de la sonde (2), après le tirage de la partie saillante, la polarité de la tension appliquée est inversée pour permettre aux ions Ag ou aux atomes Ag constituant la partie saillante tirée de se redissoudre dans le monocristal Ag2S et de faire rétrécir la partie saillante, et une sonde (2) ayant une partie saillante façonnée constituée des ions Ag ou des atomes Ag est formée. Des ions mobiles dans un matériau conducteur mixte ou des atomes constituant un matériau conducteur mixte sont appliqués à un substrat pour former une structure fine sur le substrat.

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