Seal cartridge for a rotatable magnetron

Details Seal cartridge for a rotatable magnetron Seal cartridge for a rotatable magnetron

H - Electricity

01

J

H01J 23/00 (2006.01) C23C 14/34 (2006.01) H01J 9/50 (2006.01) H01J 37/34 (2006.01)

Patent

CA 2155286

In a rotatable magnetron, a seal cartridge having vacuum seals integrated therein provides a seal between a seal housing of the magnetron support assembly and a spindle carried therein. The seal cartridge is axially movable with respect to the magnetron support assembly which enables its efficient removal and replacement therefrom. As such removal and replacement of the cartridge automatically accomplishes the removal and replacement of the integral vacuum seals, no handling or reassembly of the vacuum seals is required. The seal cartridge of the present invention provides a protected seal design which improves seal integrity in rotatable magnetrons.

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