Sealing system for a movable vacuum chamber of a charged...

F - Mech Eng,Light,Heat,Weapons – 16 – J

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F16J 15/50 (2006.01) H01J 37/18 (2006.01)

Patent

CA 1109095

ABSTRACT OF THE DISCLOSURE An improved sealing system for the vacuum chamber of a machine for processing a workpiece with a beam of charged particles is disclosed. The workpiece has an elongate processing zone which is movable relative to the vacuum chamber passing through an entrance section in a sealing zone into the vacuum chamber and exiting therefrom through an exit section of the sealing zone. The sealing zone surrounds a beam exit opening of the vacuum chamber and provides a seal against the workpiece face while permitting rel- ative movement. To improve the seal, the width of the sealing zone is en- larged either at the entrance section or at the exit section or both and various other improvements such as flexible lip seals are proposed. Also various ways of dealing with the problem of adequately sealing the weld bead are proposed. For example, an elongate slot in the seal may be provided or a wire brush arrangement which flexibly engages the weld bead may be used.

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