Secondary electron detector for use in a gaseous atmosphere

Details Secondary electron detector for use in a gaseous atmosphere Secondary electron detector for use in a gaseous atmosphere

H - Electricity

01

J

358/10

H01J 37/252 (2006.01) H01J 37/244 (2006.01)

Patent

CA 1293337

SECONDARY ELECTRON DETECTOR FOR USE IN A GASEOUS ATMOSPHERE ABSTRACT OF THE DISCLOSURE The invention provides for a device for generating, amplifying and detecting secondary electrons from a surface of a sample. The device may comprise a scanning electron microscope. The invention also provides for a method for generating, amplifying and detecting second- ary electrons from a surface of a sample.

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